Basic Knowledge For Using The SEM - JEOLExplore further
2017-3-16u2002·u2002The SEM requires an electron optical system to produce an electron probe, a specimen stage to place the speci-men, a secondary-electron detector to collect secondary electrons, an image display unit, and an operation system to perform various operations (Fig. 1). The electron opti-cal system consists of an electron gun, a condenser lens
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